Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/03/2021
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Application #:
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16450784
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Filing Dt:
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06/24/2019
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Publication #:
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Pub Dt:
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01/02/2020
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Inventors:
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Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou, Mark Leonard O'Neill
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Title:
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Low Oxide Trench Dishing Chemical Mechanical Polishing
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8555 SOUTH RIVER PARKWAY |
| PATENT DEPT. |
| TEMPE, ARIZONA 85284 |
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| LISA HOFFMANN |
| 7350 TILGHMAN STREET, SUITE 104 |
| PATENT DEPT. |
| ALLENTOWN, PA 18106-9000 |
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