Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/17/2021
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Application #:
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16713945
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Filing Dt:
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12/13/2019
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Publication #:
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Pub Dt:
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06/18/2020
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Inventors:
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Toru HISAMATSU, Yoshinari HATAZAKI, Yoshihide KIHARA, Kensuke TANIGUCHI
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Title:
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PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| ROTHWELL, FIGG, ERNST & MANBECK P.C. |
| 607 14TH ST NW STE 800 |
| WASHINGTON, DC 20005 |
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