Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/14/2021
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Application #:
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16275085
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Filing Dt:
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02/13/2019
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Publication #:
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Pub Dt:
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04/23/2020
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Inventors:
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Andrew V. Hill, Dmitry Gorelik
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Title:
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Efficient Illumination Shaping for Scatterometry Overlay
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
| 14301 FNB PARKWAY |
| SUITE 220 |
| OMAHA, NE 68154-5299 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
| 14301 FNB PARKWAY, SUITE 220 |
| OMAHA, NE 68154 |
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