Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/14/2021
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Application #:
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16118473
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Filing Dt:
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08/31/2018
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Publication #:
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Pub Dt:
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03/21/2019
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Inventors:
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Takayoshi TANAKA, Akira OATO
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Title:
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METHOD OF PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU |
| 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, |
| KYOTO, JAPAN 602-8585 |
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| JCIPRNET |
| P.O. BOX 600 TAIPEI GUTING |
| TAIPEI CITY, 10099 TAIWAN |
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