Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/21/2021
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Application #:
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16388238
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Filing Dt:
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04/18/2019
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Publication #:
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Pub Dt:
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08/08/2019
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Inventors:
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Naoya NOSAKA, Goji Wakamatsu, Tsubasa Abe, Yuushi Matsumura, Yoshio Takimoto et al
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Title:
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COMPOSITION FOR RESIST UNDERLAYER FILM FORMATION, RESIST UNDERLAYER FILM AND FORMING METHOD THEREOF, PRODUCTION METHOD OF PATTERNED SUBSTRATE, AND COMPOUND
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 9-2, HIGASHI-SHINBASHI 1-CHOME, |
| MINATO-KU, TOKYO, JAPAN |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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