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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
11126096
Issue Dt:
09/21/2021
Application #:
16650359
Filing Dt:
03/24/2020
Publication #:
20200233320
Pub Dt:
07/23/2020
Inventors:
Elvino DA SILVEIRA, Keith Frank BEST, Wayne FITZGERALD, Jian LU, Xin SONG et al
Title:
SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS
Assignment: 1
Reel/Frame:
052215/0662Recorded: 03/24/2020Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
DA SILVEIRA, ELVINO
Exec Dt:
09/18/2018
BEST, KEITH FRANK
Exec Dt:
09/18/2018
FITZGERALD, WAYNE
Exec Dt:
09/19/2018
LU, JIAN
Exec Dt:
09/18/2018
SONG, XIN
Exec Dt:
09/18/2018
DONAHER, J. CASEY
Exec Dt:
09/18/2018
MCLAUGHLIN, CHRISTOPHER J.
Exec Dt:
09/24/2018
Assignee:
RUDOLPH TECHNOLOGIES, INC.
16 JONSPIN ROAD
WILMINGTON, MASSACHUSETTS 01887
Correspondent:
JEFFREY M. WEINICK
CHIESA SHAHINIAN & GIANTOMASI PC
ONE BOLAND DRIVE
WEST ORANGE, NJ 07052
Assignment: 2
Reel/Frame:
052252/0363Recorded: 03/27/2020Pages: 81
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
RUDOLPH TECHNOLOGIES, INC.
Exec Dt:
03/12/2020
Assignee:
ONTO INNOVATION, INC.
16 JONSPIN ROAD
WILMINGTON, MASSACHUSETTS 01887
Correspondent:
JEFFREY M. WEINICK
CHIESA SHAHINIAN & GIANTOMASI PC
ONE BOLAND DRIVE
WEST ORANGE, NJ 07052

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