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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11152194
Issue Dt:
10/19/2021
Application #:
16411633
Filing Dt:
05/14/2019
Publication #:
20200365372
Pub Dt:
11/19/2020
Inventors:
Zhiying Chen, Joel Blakeney, Peter Ventzek, Alok Ranjan, Kazuya Nagaseki
Title:
PLASMA PROCESSING APPARATUSES HAVING A DIELECTRIC INJECTOR
Assignment: 1
Reel/Frame:
049175/0653Recorded: 05/14/2019Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHEN, ZHIYING
Exec Dt:
05/02/2019
BLAKENEY, JOEL
Exec Dt:
05/06/2019
VENTZEK, PETER
Exec Dt:
05/01/2019
RANJAN, ALOK
Exec Dt:
05/06/2019
NAGASEKI, KAZUYA
Exec Dt:
05/13/2019
Assignee:
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER
3-1 AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondent:
TOKYO ELECTRON U.S. HOLDINGS, INC.
2400 GROVE BLVD.
AUSTIN, TX 78741

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