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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/09/2021
Application #:
16805854
Filing Dt:
03/02/2020
Publication #:
Pub Dt:
02/04/2021
Inventors:
Jen-Hung Hsiao, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien
Title:
DROPLET GENERATOR, EUV LITHOGRAPHY DEVICE AND METHOD OF GENERATING A SERIES OF DROPLETS USING A DROPLET GENERATOR
Assignment: 1
Reel/Frame:
052970/0185Recorded: 06/18/2020Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/06/2020
Exec Dt:
05/18/2020
Exec Dt:
05/07/2020
Exec Dt:
05/11/2020
Assignee:
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK,
HSINCHU, TAIWAN 300-78
Correspondent:
JCIPRNET
8F-1, NO. 100, ROOSEVELT RD. SEC. 2,
TAIPEI, 100404 TAIWAN

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