Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/16/2021
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Application #:
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16584732
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Filing Dt:
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09/26/2019
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Publication #:
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Pub Dt:
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01/23/2020
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Inventors:
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Jared Ahmad LEE, Martin Jeffrey SALINAS, Paul B. REUTER, Imad YOUSIF, Aniruddha PAL
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Title:
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ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, L.L.P. |
| 24 GREENWAY PLAZA, SUITE 1600 |
| HOUSTON, TX 77046 |
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