Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/23/2021
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Application #:
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16055057
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Filing Dt:
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08/04/2018
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Publication #:
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Pub Dt:
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02/14/2019
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Inventors:
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Masamitsu TORAMARU, Keisuke WASHIO, Masaki CHIBA, Masao NAKATA
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Title:
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ATOMIC LAYER DEPOSITION APPARATUS, FILM-FORMING METHOD USING ATOMIC LAYER DEPOSITION APPARATUS, AND CLEANING METHOD OF ATOMIC LAYER DEPOSITION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, OSAKI 1-CHOME |
| SHINAGAWA-KU, TOKYO, JAPAN 141-0032 |
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| MITCHELL W. SHAPIRO |
| 1701 PENNSYLVANIA AVENUE, NW |
| SUITE 200 |
| WASHINGTON, DC 20006 |
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