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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
12/21/2021
Application #:
16793678
Filing Dt:
02/18/2020
Publication #:
Pub Dt:
06/11/2020
Inventor:
Akinari HAYASHI
Title:
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
Assignment: 1
Reel/Frame:
058089/0484Recorded: 11/11/2021Pages: 15
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
12/05/2018
Assignee:
3-4, KANDAKAJI-CHO, CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondent:
VOLPE KOENIG
30 SOUTH 17TH STREET
18TH FLOOR
PHILADELPHIA, PA 19103
Assignment: 2
Reel/Frame:
058089/0502Recorded: 11/11/2021Pages: 20
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/26/2021
Exec Dt:
05/25/2021
Exec Dt:
05/25/2021
Exec Dt:
06/08/2021
Exec Dt:
06/08/2021
Exec Dt:
05/25/2021
Assignee:
3-4, KANDAKAJI-CHO, CHIYODA-KU
TOKYO, JAPAN 1010045
Correspondent:
VOLPE KOENIG
30 SOUTH 17TH STREET
18TH FLOOR
PHILADELPHIA, PA 19103

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