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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/08/2022
Application #:
17033076
Filing Dt:
09/25/2020
Publication #:
Pub Dt:
01/14/2021
Inventors:
Akira ISHIKAWA, Atsushi OKUBO, Yosuke ONO, Kazuo KOHMURA
Title:
SUPPORTING FRAME FOR PELLICLE, PELLICLE, METHOD FOR MANUFACTURING SAME, EXPOSURE MASTER USING SAME, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Assignment: 1
Reel/Frame:
053891/0411Recorded: 09/25/2020Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/17/2020
Exec Dt:
08/17/2020
Exec Dt:
08/17/2020
Exec Dt:
08/17/2020
Assignee:
5-2, HIGASHI-SHIMBASHI 1-CHOME
MINATO-KU, TOKYO, JAPAN 1057122
Correspondent:
BUCHANAN INGERSOLL & ROONEY PC
1737 KING STREET
SUITE 500
ALEXANDRIA, VA 22314-2727

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