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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11251048
Issue Dt:
02/15/2022
Application #:
16896304
Filing Dt:
06/09/2020
Publication #:
20200402805
Pub Dt:
12/24/2020
Inventors:
Yusuke AOKI, Toshikatsu TOBANA, Fumiya TAKATA, Shinya MORIKITA, Kazunobu FUJIWARA et al
Title:
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
052881/0895Recorded: 06/09/2020Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
AOKI, YUSUKE
Exec Dt:
06/02/2020
TOBANA, TOSHIKATSU
Exec Dt:
06/03/2020
TAKATA, FUMIYA
Exec Dt:
06/03/2020
MORIKITA, SHINYA
Exec Dt:
06/03/2020
FUJIWARA, KAZUNOBU
Exec Dt:
06/02/2020
ABE, JUN
Exec Dt:
06/02/2020
NAGAMI, KOICHI
Exec Dt:
06/02/2020
Assignee:
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
STUDEBAKER & BRACKETT PC
8255 GREENSBORO DRIVE
SUITE 300
TYSONS, VA 22102

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