Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/22/2022
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Application #:
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16092193
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Filing Dt:
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10/08/2018
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Publication #:
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Pub Dt:
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10/22/2020
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Inventors:
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Hui Wang, Fuping Chen, Xi Wang, Yinuo Jin, Liangzhi Xie, Jun Wang, Fufa Chen, Jian Wang et al
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Title:
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METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| BUILDING 4, NO. 1690, CAI LUN ROAD |
| ZHANGJIANG HIGH-TECH PARK, PUDONG DISTRICT |
| CHANGHAI, CHINA 201203 |
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| K&L GATES LLP |
| 210 SIXTH AVENUE |
| PITTSBURGH, PA 15222-2613 |
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