Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/22/2022
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Application #:
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16970014
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Filing Dt:
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08/14/2020
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Publication #:
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Pub Dt:
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12/31/2020
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Inventors:
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Masanori Ito, Katsunori Fujii, Yasushi Iwata
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Title:
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Power Supply Apparatus for Electrostatic Chuck and Substrate Control Method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2609-5, HAGISONO, CHIGASAKI-SHI |
| KANAGAWA, JAPAN 253-8555 |
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| TOMOKO NAKAJIMA |
| CERMAK NAKAJIMA & MCGOWAN LLP |
| 127 S. PEYTON ST., SUITE 200 |
| ALEXANDRIA, VA 22314 |
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