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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/15/2022
Application #:
17240805
Filing Dt:
04/26/2021
Publication #:
Pub Dt:
09/02/2021
Inventors:
Yen-Liang CHEN, Hung-Chih HSIEH
Title:
METHOD AND APPARATUS FOR DIFFRACTION-BASED OVERLAY MEASUREMENT
Assignment: 1
Reel/Frame:
056044/0459Recorded: 04/26/2021Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/03/2020
Exec Dt:
03/03/2020
Assignee:
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK
HSINCHU, TAIWAN 300
Correspondent:
MCDERMOTT WILL & EMERY LLP
THE MCDERMOTT BUILDING
500 NORTH CAPITOL STREET
WASHINGTON, DC 20001

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