Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/05/2022
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Application #:
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16787947
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Filing Dt:
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02/11/2020
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Publication #:
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Pub Dt:
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08/12/2021
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Inventors:
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Ssu-Yu CHEN, Shang-Chieh CHIEN, Li-Jui CHEN
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Title:
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EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH HEATED TIN VANE BUCKET HAVING A HEATED COVER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN RD.6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MASCHOFF BRENNAN |
| 1389 CENTER DRIVE, SUITE 300 |
| PARK CITY, UT 84098 |
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