Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/12/2022
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Application #:
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16679052
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Filing Dt:
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11/08/2019
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Publication #:
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Pub Dt:
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03/05/2020
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Inventors:
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Daniel Gene Smith, David M. Williamson, Donis G. Flagello, Michael B. Binnard
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Title:
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ILLUMINATION SYSTEM WITH CURVED 1D-PATTERNED MASK FOR USE IN EUV-EXPOSURE TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SHINAGAWA INTERCITY TOWER C, 2-15-3 |
| KONAN, MINATO-KU |
| TOKYO, JAPAN 108-6290 |
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| KLARQUIST SPARKMAN, LLP |
| 121 SW SALMON STREET, SUITE 1600 |
| ONE WORLD TRADE CENTER |
| PORTLAND, OR 97204 |
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