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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/26/2022
Application #:
17009167
Filing Dt:
09/01/2020
Publication #:
Pub Dt:
12/17/2020
Inventors:
Kallol Bera, Dmitry A. Dzilno, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka
Title:
Shaped Electrodes For Improved Plasma Exposure From Vertical Plasma Source
Assignment: 1
Reel/Frame:
053685/0788Recorded: 09/03/2020Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/04/2019
Exec Dt:
07/23/2020
Exec Dt:
08/23/2019
Exec Dt:
08/30/2019
Exec Dt:
04/27/2020
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
SERVILLA WHITNEY LLC
33 WOOD AVENUE SOUTH
SUITE 830
ISELIN, NJ 08830

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