Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/26/2022
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Application #:
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17326945
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Filing Dt:
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05/21/2021
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Publication #:
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Pub Dt:
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11/25/2021
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Inventors:
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Qi Zhang, Haichun Yang, Hua Chung, Michael X. Yang
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Title:
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Processing of Workpieces Using Ozone Gas and Hydrogen Radicals
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 47131 BAYSIDE PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| DORITY & MANNING, P.A. AND MATTSON |
| PO BOX 1449 |
| GREENVILLE, SC 29602 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8 BUILDING, NO. 28 JINGHAI ER RD |
| BEIJING, CHINA 100176 |
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| 47131 BAYSIDE PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| DORITY & MANNING, P.A. AND MATTSON |
| PO BOX 1449 |
| GREENVILLE, SC 29602 |
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