Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/03/2022
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Application #:
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17034173
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Filing Dt:
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09/28/2020
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Publication #:
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Pub Dt:
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04/01/2021
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Inventors:
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Shunya KUBOTA, Emi MATSUI, Katsuhiro YAMAZAKI, Yoshikazu OHTANI, Kyouhei TOMIOKA
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 9, KANDA-NISHIKICHO 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| 5-1, KASAMA 2-CHOME, SAKAE-KU, YOKOHAMA-SHI |
| KANAGAWA, JAPAN |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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