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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/17/2022
Application #:
16645171
Filing Dt:
03/06/2020
Publication #:
Pub Dt:
06/03/2021
Inventors:
Hui Wang, Xi Wang, Fuping Chen
Title:
METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFER
Assignment: 1
Reel/Frame:
052351/0693Recorded: 04/09/2020Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/13/2020
Exec Dt:
03/17/2020
Exec Dt:
03/17/2020
Assignee:
BLD. 4, NO. 1690 CAILUN ROAD
ZHANGJIANG HIGH-TECH PARK
SHANGHAI, CHINA 201203
Correspondent:
JEFFREY S. BERGMAN
909 FANNIN
SUITE 3500
HOUSTON, TX 77010

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