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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/31/2022
Application #:
17250980
Filing Dt:
04/06/2021
Publication #:
Pub Dt:
12/16/2021
Inventors:
Haruhiko Kuriki, Kenji Aikawa, Hajime Nakagawa
Title:
FLUID SUPPLY SYSTEM, FLUID CONTROL DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE
Assignment: 1
Reel/Frame:
055848/0629Recorded: 04/07/2021Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/01/2021
Exec Dt:
03/01/2021
Exec Dt:
03/11/2021
Assignee:
3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-SHI
OSAKA, JAPAN 5500012
Correspondent:
AUSTEN ZUEGE
121 SOUTH EIGHTH STREET, SUITE 1100
MINNEAPOLIS, MN 55402

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