Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/21/2022
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Application #:
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16269337
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Filing Dt:
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02/06/2019
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Publication #:
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Pub Dt:
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06/20/2019
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Inventors:
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Praket P. JHA, Allen KO, Xinhai HAN, Thomas Jongwan KWON, Bok Hoen KIM, Byung Ho KIL et al
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Title:
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PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF FILMS FOR IMPROVED VERTICAL ETCH PERFORMANCE IN 3D NAND MEMORY DEVICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, LLP |
| 24 GREENWAY PLAZA, SUITE 1600 |
| HOUSTON, TX 77046 |
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