Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/05/2022
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Application #:
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16987717
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Filing Dt:
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08/07/2020
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Publication #:
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Pub Dt:
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02/10/2022
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Inventors:
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Fei ZHOU, Rahul SHARANGPANI, Naoki TAKEGUCHI, Raghuveer S. MAKALA, Yusuke MUKAE
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Title:
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FLUORINE-FREE TUNGSTEN DEPOSITION PROCESS EMPLOYING IN-SITU OXIDATION AND APPARATUSES FOR EFFECTING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5080 SPECTRUM DRIVE |
| SUITE 1050W |
| ADDISON, TEXAS 75001 |
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| THE MARBURY LAW GROUP, PLLC |
| 11800 SUNRISE VALLEY DRIVE |
| 15TH FLOOR |
| RESTON, VA 20191 |
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