Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/16/2022
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Application #:
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16758599
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Filing Dt:
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04/23/2020
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Publication #:
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Pub Dt:
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04/29/2021
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Inventors:
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Naoyuki WADA, Yu MINAMIDE, Yasutaka TAKEMURA
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Title:
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APPARATUS AND METHOD FOR MANUFACTURING EPITAXIAL WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8634 |
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| GREENBLUM & BERNSTEIN, P.L.C. |
| 1950 ROLAND CLARKE PLACE |
| RESTON, VA 20191 |
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