Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/16/2022
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Application #:
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17147293
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Filing Dt:
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01/12/2021
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Publication #:
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Pub Dt:
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05/27/2021
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Inventors:
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Matthias KAES, Steffen BEZOLD, Matthias MANGER, Christoph PETRI, Pavel ALEXEEV et al
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Title:
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METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPARATUS AND REFLECTING OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| EDELL, SHAPIRO & FINNAN, LLC |
| GEORGE F. LEHNIGK |
| 9801 WASHINGTONIAN BLVD., SUITE 750 |
| GAITHERSBURG, MD 20878 |
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