Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/27/2022
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Application #:
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16896815
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Filing Dt:
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06/09/2020
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Publication #:
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Pub Dt:
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12/17/2020
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Inventors:
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Nobuyuki Iijima, Hiroharu Yanagisawa, Yuichi Nakamura, Ryuji Takahashi
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Title:
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SUBSTRATE FIXING APPARATUS INCLUDING A BASE PLATE, AN ELECTROSTATIC ADSORPTION MEMBER, A PLURALITY OF SUPPORT MEMBERS ON THE BASE PLATE AND SUPPORTING THE ELECTROSTATIC ADSORPTION MEMBER, AND AN ADHESIVE LAYER BONDING THE ELECTROSTATIC ADSORPTION MEMBER TO THE BASE PLATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 80, OSHIMADA-MACHI |
| NAGANO-SHI, NAGANO, JAPAN 381-2287 |
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| RANKIN HILL AND CLARK LLP |
| 38210 GLENN AVENUE |
| WILLOUGHBY, OH 44094 |
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