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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/04/2022
Application #:
16729540
Filing Dt:
12/30/2019
Publication #:
Pub Dt:
07/16/2020
Inventors:
Bernhard Stein, Cornelius Günther, Udo Scheller, Heinz-Martin Esser, Steffen Pollack
Title:
Interface Device for a Purging Unit for Purging a Wafer Container
Assignment: 1
Reel/Frame:
051444/0283Recorded: 12/30/2019Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/19/2019
Exec Dt:
12/19/2019
Exec Dt:
12/19/2019
Exec Dt:
12/18/2019
Exec Dt:
12/19/2019
Assignee:
ZUR STEINHÖHE 1
DRESDEN, GERMANY 01109
Correspondent:
MICHAEL SODERMAN
TAUENTZIENSTR 9-12
BERLIN, 10789 GERMANY

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