Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/11/2022
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Application #:
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17041405
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Filing Dt:
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09/24/2020
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Publication #:
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Pub Dt:
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02/11/2021
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Inventor:
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Koji KANEKO
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Title:
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METHOD AND APPARATUS FOR GENERATING A CORRECTION LINE INDICATING RELATIONSHIP BETWEEN DEVIATION OF AN EDGE OF A WAFER PATTERN FROM AN EDGE OF A REFERENCE PATTERN AND SPACE WIDTH OF THE REFERENCE PATTERN, AND A COMPUTER-READABLE RECORDING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-6-23, SHIN-YOKOHAMA, KOHOKU-KU, YOKOHAMA-SHI, KANAGAWA |
| YOKOHAMA, JAPAN 222-0033 |
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| LATHROP GPM LLP |
| 2440 JUNCTION PLACE, SUITE 300 |
| BOULDER, CO 80301 |
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