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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	11486043	Issue Dt:	11/01/2022	Application #:	16526088	Filing Dt:	07/30/2019
Publication #:	20200040463	Pub Dt:	02/06/2020
Inventors:	Shigeru NAKAJIMA, Yusuke TACHINO, Yoshihiro TAKEZAWA, Katsushige HARADA
Title:	Metal Contamination Prevention Method and Apparatus, and Substrate Processing Method Using the Same and Apparatus Therefor

Assignment: 1

Reel/Frame:

049918/0698

Recorded: 07/31/2019

Pages: 7

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

TAKEZAWA, YOSHIHIRO

Exec Dt:

07/16/2019

NAKAJIMA, SHIGERU

Exec Dt:

07/16/2019

HARADA, KATSUHIGE

Exec Dt:

07/16/2019

TACHINO, YUSUKE

Exec Dt:

07/16/2019

Assignee:

TOKYO ELECTRON LIMITED

AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU

TOKYO, JAPAN 107-6325

Correspondent:

NATH, GOLDBERG & MEYER

112 S WEST STREET

36736U_JLM_HJ

ALEXANDRIA, VA 22314

Assignment: 2

Reel/Frame:

050797/0639

Recorded: 10/22/2019

Pages: 8

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE FIRST NAME OF THE THIRD INVENTOR FROM KATSUHIGE TO KATSUSHIGE PREVIOUSLY RECORDED ON REEL 049918 FRAME 0698. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNOR'S INTEREST.

Assignors:

TAKEZAWA, YOSHIHIRO

Exec Dt:

07/16/2019