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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/29/2022
Application #:
16878242
Filing Dt:
05/19/2020
Publication #:
Pub Dt:
11/26/2020
Inventors:
Shintaro KOGURA, Kazuhiro HARADA, Shogo OTANI, Koichi HONDA, Mamoru UMEMOTO et al
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF PROCESSING SUBSTRATE
Assignment: 1
Reel/Frame:
053229/0078Recorded: 07/16/2020Pages: 13
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/28/2020
Exec Dt:
05/27/2020
Exec Dt:
06/07/2020
Exec Dt:
05/28/2020
Exec Dt:
05/28/2020
Exec Dt:
05/28/2020
Exec Dt:
06/05/2020
Exec Dt:
05/27/2020
Exec Dt:
06/15/2020
Assignee:
3-4, KANDAKAJI-CHO
CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondent:
VOLPE AND KOENIG P.C.
30 SOUTH 17TH STREET
SUITE 1800
PHILADELPHIA, PA 19103

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