Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/06/2022
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Application #:
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17049729
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Filing Dt:
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10/22/2020
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Publication #:
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Pub Dt:
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08/12/2021
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Inventors:
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Stefan REBER, Benjamin REICHHART, Kai SCHILLINGER, Nena MILENKOVIC
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Title:
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APPARATUS AND METHOD FOR ETCHING ONE SIDE OF A SEMICONDUCTOR LAYER OF A WORKPIECE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HANS-BUNTE-STRASSE 19 |
| FREIBURG, GERMANY 79108 |
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| VOLPE KOENIG |
| 30 SOUTH 17TH STREET, 18TH FLOOR |
| PHILADELPHIA, PA 19103 |
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