Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/06/2022
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Application #:
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17461456
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Filing Dt:
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08/30/2021
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Inventors:
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Shao-Hua WANG, Chueh-Chi KUO, Heng-Hsin LIU, Shih-Yu TU, Yen-Hao LIU, Li-Jui CHEN
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Title:
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HIGHLY EFFICIENT AUTOMATIC PARTICLE CLEANER METHOD FOR EUV SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITOL STREET NW |
| WASHINGTON, DC 20001 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE FIFTH AND SIXTH ASSIGNOR NAMES PREVIOUSLY RECORDED AT REEL: 057331 FRAME: 0312. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
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| NO. 8, LI-HSIN RD. 6 |
| SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITOL STREET NW |
| WASHINGTON,, DC 20001 |
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05/14/2024 11:47 PM
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