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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	11520953	Issue Dt:	12/06/2022	Application #:	15970744	Filing Dt:	05/03/2018
Publication #:	20190340316	Pub Dt:	11/07/2019
Inventors:	Thorsten Lill, Andreas Fischer, Ivan L. Berry III, Nerissa Sue Draeger et al
Title:	PREDICTING ETCH CHARACTERISTICS IN THERMAL ETCHING AND ATOMIC LAYER ETCHING

Assignment: 1

Reel/Frame:

046247/0193

Recorded: 06/29/2018

Pages: 5

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

LILL, THORSTEN

Exec Dt:

05/01/2018

FISCHER, ANDREAS

Exec Dt:

05/16/2018

BERRY, IVAN L., III

Exec Dt:

05/01/2018

DRAEGER, MELISSA SUE

Exec Dt:

05/01/2018

GOTTSCHO, RICHARD A.

Exec Dt:

05/15/2018

Assignee:

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY

FREMONT, CALIFORNIA 94538

Correspondent:

WEAVER AUSTIN VILLENEUVE & SAMPSON LLP

P.O. BOX 70250

OAKLAND, CA 94612

Assignment: 2

Reel/Frame:

048972/0001

Recorded: 04/23/2019

Pages: 7

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE SPELLING OF THE FOURTH ASSIGNOR'S NAME PREVIOUSLY RECORDED ON REEL 046247 FRAME 0193. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.

Assignors:

LILL, THORTEN

Exec Dt:

05/01/2018