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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/13/2022
Application #:
16999065
Filing Dt:
08/21/2020
Publication #:
Pub Dt:
02/25/2021
Inventors:
Hidemi Suemori, Yuko Kengoyama, Ryu Nakano
Title:
METHOD FOR DEPOSITING SILICON OXIDE FILM HAVING IMPROVED QUALITY BY PEALD USING BIS(DIETHYLAMINO)SILANE
Assignment: 1
Reel/Frame:
053954/0405Recorded: 10/01/2020Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/08/2020
Exec Dt:
07/07/2020
Exec Dt:
07/08/2020
Assignee:
VERSTERKERSTRAAT 8
ALMERE, NETHERLANDS 1322 AP
Correspondent:
PATRICK LEE
3440 E. UNIVERSITY DRIVE
PHOENIX, AZ 85034

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