Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/07/2023
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Application #:
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15900836
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Filing Dt:
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02/21/2018
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Publication #:
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Pub Dt:
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09/06/2018
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Inventors:
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Takeshi Kobayashi, Hitoshi Kato, Yukio Ohizumi
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Title:
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ROTATION DETECTION JIG, SUBSTRATE PROCESSING APPARATUS AND METHOD OF OPERATING THE SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| NATH, GOLDBERG & MEYER |
| 112 S. WEST ST. |
| 35690U-JLM/SSS |
| ALEXANDRIA, VA 22314 |
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