Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2023
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Application #:
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17425974
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Filing Dt:
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07/27/2021
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Publication #:
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Pub Dt:
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06/23/2022
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Inventors:
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Daihi TSUCHIGUCHI, Ryutaro TANNO, Kenta KONDO, Toshihide YOSHIDA, Yuya SUZUKI et al
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Title:
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VALVE DEVICE, FLOW RATE CONTROL METHOD, FLUID CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS USING THE VALVE DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-CITY |
| OSAKA, JAPAN 5500012 |
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| GREENBLUM & BERNSTEIN, P.L.C. |
| 1950 ROLAND CLARKE PLACE |
| RESTON, VA 20191 |
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