Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2023
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Application #:
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16677847
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Filing Dt:
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11/08/2019
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Inventors:
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Yasuharu SASAKI, Yohei UCHIDA
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Title:
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SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND FOCUS RING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| ROTHWELL FIGG ERNST & MANBECK P.C. |
| 607 14TH STREET, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20005 |
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