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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/04/2023
Application #:
17279482
Filing Dt:
03/24/2021
Inventors:
Yusuke TANATSUGU, Hayato YAMAGUCHI, Eiichiro ISHIMIZU
Title:
METHOD FOR POLISHING SILICON WAFER WITH REDUCED WEAR ON CARRIER, AND POLISHING LIQUID USED THEREIN
Assignment: 1
Reel/Frame:
055723/0290Recorded: 03/25/2021Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/07/2021
Exec Dt:
01/07/2021
Exec Dt:
01/07/2021
Assignee:
5-1, NIHONBASHI 2-CHOME, CHUO-KU
TOKYO, JAPAN 1036119
Correspondent:
BIRCH STEWART KOLASCH & BIRCH LLP
8110 GATEHOUSE ROAD, SUITE 100 EAST
FALLS CHURCH, VA 22042

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