Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/09/2023
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Application #:
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16510286
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Filing Dt:
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07/12/2019
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Publication #:
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Pub Dt:
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01/23/2020
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Inventors:
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Chun Lu, Xiaobo Shi, Dnyanesh Chandrakant Tamboli, Reinaldo Mario Machado et al
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Title:
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Tungsten Chemical Mechanical Polishing For Reduced Oxide Erosion
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8555 SOUTH RIVER PARKWAY |
| TEMPE, ARIZONA 85284 |
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| LISA HOFFMANN |
| 7350 TILGHMAN STREET, SUITE 104 |
| PATENT DEPT. |
| ALLENTOWN, PA 18106-9000 |
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