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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/30/2023
Application #:
17530581
Filing Dt:
11/19/2021
Publication #:
Pub Dt:
05/26/2022
Inventors:
Masashi TSUCHIYAMA, Taro YAMAMOTO, Tsuyoshi WATANABE, Suguru ENOKIDA
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignment: 1
Reel/Frame:
058177/0776Recorded: 11/22/2021Pages: 22
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/15/2020
Exec Dt:
11/01/2021
Exec Dt:
11/01/2021
Exec Dt:
11/05/2021
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondent:
NATH, GOLDBERG & MEYER
112 S WEST STREET
38853U_JLM_HJ
ALEXANDRIA, VA 22314

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