Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/30/2023
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Application #:
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16969260
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Filing Dt:
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08/12/2020
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Publication #:
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Pub Dt:
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01/07/2021
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Inventors:
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Alexander MATYUSHKIN, Keith Laurence COMENDANT, John Patrick HOLLAND
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Title:
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ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOVE AND MONOPOLAR ELECTROSTATIC CLAMPING ELECTRODE PATTERNS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| 5445 CORPORATE DRIVE |
| SUITE 200 |
| TROY, MI 48098 |
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