Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/18/2023
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Application #:
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17197654
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Filing Dt:
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03/10/2021
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Publication #:
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Pub Dt:
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09/16/2021
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Inventors:
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Michael J. Moody, Lincoln J. Lauhon, Ju Ying Shang
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Title:
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In Situ Monitoring of Field-Effect Transistors During Atomic Layer Deposition
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 633 CLARK STREET |
| EVANSTON, ILLINOIS 60208 |
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| BENESCH, FRIEDLANDER, COPLAN & ARONOFF LLP |
| 200 PUBLIC SQUARE, SUITE 2300 |
| CLEVELAND, OH 44114 |
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