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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11732357
Issue Dt:
08/22/2023
Application #:
16892766
Filing Dt:
06/04/2020
Publication #:
20200392622
Pub Dt:
12/17/2020
Inventors:
Tsuyoshi TAKAHASHI, Mitsuhiro OKADA, Yasushi FUJII, Yu NUNOSHIGE, Shinji KAWASAKI et al
Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
052855/0958Recorded: 06/05/2020Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TAKAHASHI, TSUYOSHI
Exec Dt:
05/20/2020
OKADA, MITSUHIRO
Exec Dt:
05/20/2020
FUJII, YASUSHI
Exec Dt:
05/27/2020
NUNOSHIGE, YU
Exec Dt:
05/20/2020
KAWASAKI, SHINJI
Exec Dt:
05/20/2020
KUWADA, HIROTAKA
Exec Dt:
05/22/2020
TAKAGI, TOSHIO
Exec Dt:
05/22/2020
Assignee:
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
NATH GOLDBERG AND MEYER
112 S WEST ST
ALEXANDRIA, VA 22314

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