Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/29/2023
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Application #:
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17852632
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Filing Dt:
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06/29/2022
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Publication #:
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Pub Dt:
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10/13/2022
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Inventors:
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Yu-Kai CHEN, Po-Hung CHEN
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Title:
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PHOTORESIST BAKING APPARATUS WITH COVER PLATE HAVING UNEVEN EXHAUST HOLE DISTRIBUTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| MCCLURE, QUALEY & RODACK LLP |
| 280 INTERSTATE NORTH CIRCLE |
| SUITE 550 |
| ATLANTA, GA 30339 |
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