Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/24/2023
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Application #:
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17577511
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Filing Dt:
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01/18/2022
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Publication #:
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Pub Dt:
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05/05/2022
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Inventors:
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Korehito KATO, Hisashi SHIMIZU
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Title:
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DRY ETCHING GAS COMPOSITION COMPRISING SULFUR-CONTAINING FLUOROCARBON COMPOUND HAVING UNSATURATED BOND AND DRY ETCHING METHOD USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-2, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-0005 |
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| BROWDY AND NEIMARK, PLLC |
| 1625 K STREET, N.W. |
| SUITE 550 |
| WASHINGTON, DC 20006 |
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