Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/14/2023
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Application #:
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17280427
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Filing Dt:
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03/26/2021
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Publication #:
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Pub Dt:
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01/06/2022
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Inventors:
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Norihito YAMAGUCHI, Takanao SEIKE, Haruhiko DOI, Masato SUGAHARA, Masaki INOUE
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Title:
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POLISHING LIQUID COMPOSITION FOR SILICON OXIDE FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-10, NIHONBASHI KAYABACHO 1-CHOME, CHUO-KU |
| TOKYO, JAPAN 103-8210 |
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| BIRCH STEWART KOLASCH & BIRCH LLP |
| 8110 GATEHOUSE ROAD, SUITE 100E |
| FALLS CHURCH, VA 22042 |
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