Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/14/2023
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Application #:
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17280248
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Filing Dt:
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03/26/2021
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Publication #:
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Pub Dt:
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02/17/2022
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Inventors:
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Kars Zeger TROOST, Eelco VAN SETTEN, Duan-Fu Stephen HSU
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Title:
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METHOD FOR HIGH NUMERICAL APERTURE THRU-SLIT SOURCE MASK OPTIMIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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