Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/21/2023
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Application #:
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17722909
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Filing Dt:
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04/18/2022
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Publication #:
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Pub Dt:
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10/19/2023
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Inventors:
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Tai-Yu Chen, Shang-Chieh Chien, Sagar Deepak Khivsara, Kai Tak Lam, Sheng-Kang Yu
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Title:
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ACOUSTIC PARTICLE DEFLECTION IN LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, |
| HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| FAY SHARPE LLP |
| 1228 EUCLID AVENUE, 5TH FLOOR |
| THE HALLE BUILDING |
| CLEVELAND, 44115 UNITED STATES |
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